Clean Transport Systems
Product line up in wide range that supports semiconductor production miniaturizing with more values
SINFONIA’s clean transport system is highly trusted as world’s top brand in semiconductor production and transportation processes.
For load port business, which holds the top market share, we offer our unique next generation model with nitrogen purging mechanism.
Further, we respond to various needs with a product line up of transportation system solutions, from vacuum transportation, atmospheric transportation (such as EFEM), to sorters that support stable wafer transfer.
Main products
300mm FOUP Load Port
300/200mm Auto Switch Load Port
200mm SMIF Load Port
EFEM
Panel FOUP Load Port
Tape Frame FOUP Load Port