300mm EFEM

1. Vacuum-Less/Vacuum Wafer Handling (Clean Class 1)
   reduce adhearing particles on back side of wafer
2. Application to 200mm Wafer and Quartz Wafer
   (300mm option)
3. High Speed and Accurate Wafer Handling (±0.05mm)
4. Installation of N₂ Purge Load ports
   (option)
5. Standard 3 Loadport Type + Extendable Module
   (option)
6. Corrosion Resistance Compliance
   (option)

300mm wafer handling robot