Automated Wafer Transportation System
for LED
Power Semiconductor
Applicable for Increasing Size of LED/Power Semiconductor Wafer
![](https://www.sinfo-t.com/application/files/2016/7461/8422/led_p-efem-product.jpg)
- 300/200mm Wafer Mapping Function (No Change Required)
- Power Saving Technology by Auto set and Transfer Wafer Between Cassette and Process System
- High Yield Due to Handling in Clean N2 Atmosphere (by N2 circulation)
(decrease particle, moisture and O2) - High Productivity Due to Capable of Handling Hot Wafer After Process
![](https://www.sinfo-t.com/application/files/3516/5883/5989/led_p-efem-fig-2.jpg)
Past Operation
![](https://www.sinfo-t.com/application/files/8817/0891/9115/led_p-efem-fig-3.jpg)
Automated Wafer Transportation System (EFEM)
![](https://www.sinfo-t.com/application/files/8517/0891/9127/led_p-efem-fig-4.jpg)