Automated Wafer Transportation System
for LED
Power Semiconductor
Applicable for Increasing Size of LED/Power Semiconductor Wafer
- 300/200mm Wafer Mapping Function (No Change Required)
- Power Saving Technology by Auto set and Transfer Wafer Between Cassette and Process System
- High Yield Due to Handling in Clean N2 Atmosphere (by N2 circulation)
(decrease particle, moisture and O2) - High Productivity Due to Capable of Handling Hot Wafer After Process
Past Operation
Automated Wafer Transportation System (EFEM)
