300mm N2 EFEM
N2 purge
300mm
Ability to Perform Cutting Edge Processes by Regulating Ox/H2O Levels within the EFEM
- Extremely Low Level Oxygen Density Control
Less than 100ppm with low N2 gas consumption (100LPM) by N2 gas circulation system - Fine Differential Pressure Automatic Control
10 +/- 3.5 Pa gage - Equivalent Footprint as Conventional EFEM
(1) With the stationary type robot, maximum 4 LP access is possible: No need to change depth of N2 EFEM
(2) Maintenance access from side as conventional EFEM (or can use EFEM side position for additional options)
(3) Flexible layout for position of customer L/L - EFEM Inside Environment Monitor/Analyzing
Digital analyzers (Oxygen concentration, Dew point, Temperature, Diff. Pressure)
Real time data monitoring - Safe Operation
Safely replace N2 gas to Air
*S2, S8, CE compliance (In progress)
