Panel FOUP Load Port
250 x 250 mm
300 x 300 mm
510 x 515 mm
600 x 600 mm
SELOP Series
Support Next Generation Integration Technology (FOPLP) on Large Panel
- High-precision mapping
- Particle free
- SEMI standard conformity
- Supports various substrate sizes
600×600mm
510×515mm
300×300mm
250×250mm
For more information, please contact our sales representative.
Specification
| Model | SELOP20F12-SP | SELOP24F12-SP |
|---|---|---|
| Target work | 515×510mm PANEL | 600×600mm PANEL |
| Dimensions | W793×D739×H1433 (mm) | W793×D810×H1433 (mm) |
| Weight | 140 kg | 150 kg |
| Application | 6/12 PANELS FOUP (Compliant with SEMI E-181 standard) | |
| Cycle time | 20sec.at FOUP opening (incl. mapping process) 15sec.at FOUP closing (excl. mapping process) |
|
| Door holding method | Vacuum absorption method | |
| Positioning accuracy | ±0.1mm on FOUP front / rear axis、±0.1mm on FOUP up / down axis | |
| Detecting function | ①FOUP presence ②FOUP placement ③FOUP door presence ④Wafer mapping ⑤Wafer protrusion ⑥Hand safety | |
| Moving mechanism | ①Door (Up/Down・Open/Close・Wafer mapping) : Stepping motor・Timing belt ②Clamp・Dock・Latch key: Air cylinder | |
| Standard function | ①Wafer mapping ②Controller ③Undock position adjustment function (for adjustment with OHT line) ④BOLTS surface position adjustment mechanism ⑤Self-standing caster ⑥Ethernet※ communication specification | |
| Utility | ①Electricity： DC24V 5A ②Air : 0.45 ‒ 0.6MPa 10L/min ③Vacuum air :－60Kpa 5L/min | |
| Communication interface | RS232C, Ethernet※ TCP/IP | |
| Option | ①Customizable indicator panel ②Customizable switch panel ③Carrier ID reader ④Infopad (A,B,C,D,E,F)） (hard pin and sensor) ⑤PIO ⑥Excluding mapping function ⑦Applicable to AC200V ⑧E84 ⑨E84,CID communication ⑩Sealing to BOLTS surface ⑪N₂ purge | |
*1. For more information, please contact our sales representative.
*2. Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.
