300mm FOUP Load Port
N2 purge
300mm
Contribution to Further Miniaturization (1xnm)
Smart SELOP-8 Series
Extremely Smooth FOUP Door Open/Close Motion
Great improvement of particle performance. Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism.
Compliance of high sealed FOUP.
- N2 purging on carrier base
Adapted FOUP Type: ENTEGRIS A-300, Spectra
(4 Purge Port Type) - Purge llean N2 gas
(1) Filters, installed just in front of the nozzle, can block particle from entering to FOUP
(2) Adhesion to grommet of FOUP - Monitor N2 gas flow rate by flow meter
- Control N2 gas flow rate by MFC
- Field upgrade from standard SELOP8 to N2 purge load port is possible
Superior Stable N2 Purge by Original Movable Nozzle.U.S. Patent Granted
- Control nozzle up/down timing
Avoid interference to Kinematic Pin during FOUP placement Interoperatability of non-N2 purge FOUP - Adjustment function of nozzle pressure
- Exchangeable nozzle heads for Suitable attach to ports
- Nozzle up/down position detect function (Sensor)
N2 purging on carrier base
