300/200mm Auto Switch Load Port
300mm
200mm
Ideal for lines with mixed wafer sizes!
SELOP-08C12F-S81 Series
300mm FOUP and 200mm Open Cassette Both Can Be Used Just by Remounting!
![](https://www.sinfo-t.com/application/files/3116/6329/4799/selop8-as-product.jpg)
- Automatic carrier identification function
- Mapping function
- Wafer-out detection
Two Types of Open Cassette Adapter
Many experiences
Tilt type
Low cost model
Horizontal type
![](https://www.sinfo-t.com/application/files/9416/6329/4799/selop8-as-fig-2type.jpg)
Operation Flow
![](https://www.sinfo-t.com/application/files/8417/0891/7852/selop8-as-fig-flow.jpg)
Specification
LOAD PORT | SELOP08C12F-S81 Series |
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Dimensions | W474mm x D547mm x H1381mm (Load Port) |
W455mm x D300mm x H432mm (Tilt-type 200mmOCA) | |
W430mm x D315mm x H373mm (Horizontal-type 200mmOCA) | |
Weight | 65kg (LP) |
13.2kg (Tilt-type 200mmOCA) | |
8.5kg (Horizontal-type 200mmOCA) |
200mm wafer operation | 300mm wafer operation | |
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Application | 200mm 25 slot cassette (SEMI-Standard) |
300mm 25 slot FOUP (SEMI-Standard) |
Cycle time | Open: 11sec. (including mapping), Close: 7sec. (excluding mapping) |
Open: 12sec. (including mapping), Close: 9sec. (excluding mapping) |
Door holding method | N/A | Vacuum absorption method |
Detecting function | ①Open cassette normal placement ②Stage normal placement ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
①FOUP normal placement ②Foup door checking ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
Standard feature | ①Wafer mapping ②Controller ③Carrier base placement adjustment mechanism ④Bolts surface position adjustment mechanism |
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⑤Cassette side-slip prevention ⑥300mm FOUP Infopad pin holder ⑦Stage fixation at wafer horizontal position ⑧Minimizing vibration in rotating and power |
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Utility | ①Power: DC24V 5A ②CDA: 0.45~0.6 MPa 20 L/min ③Vacuum: -40kPa 5L/min |
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Communication interface | RS232C or Ethernet*2 | |
Options | ①Customizable indicator panel ②Customizable switch panel ③Applicable to AC200V ④Applicable to FOSB*1 ⑤E84 ⑥E84,CID communication (300mm FOUP only) |
*1. Depending on FOSB type, performance may vary. please contact us for details.
*2. Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.
Outline Drawing
![](https://www.sinfo-t.com/application/files/9117/2048/4284/selop8-as-fig.gif)