300/200mm Auto Switch Load Port
300mm
200mm
Ideal for lines with mixed wafer sizes!
SELOP-08C12F-S81 Series
300mm FOUP and 200mm Open Cassette Both Can Be Used Just by Remounting!
- Automatic carrier identification function
- Mapping function
- Wafer-out detection
Two Types of Open Cassette Adapter
Many experiences
Tilt type
Low cost model
Horizontal type
Operation Flow
Specification
| LOAD PORT | SELOP08C12F-S81 Series |
|---|---|
| Dimensions | W474mm x D547mm x H1381mm (Load Port) |
| W455mm x D300mm x H432mm (Tilt-type 200mmOCA) | |
| W430mm x D315mm x H373mm (Horizontal-type 200mmOCA) | |
| Weight | 65kg (LP) |
| 13.2kg (Tilt-type 200mmOCA) | |
| 8.5kg (Horizontal-type 200mmOCA) |
| 200mm wafer operation | 300mm wafer operation | |
|---|---|---|
| Application | 200mm 25 slot cassette (SEMI-Standard) |
300mm 25 slot FOUP (SEMI-Standard) |
| Cycle time | Open: 11sec. (including mapping), Close: 7sec. (excluding mapping) |
Open: 12sec. (including mapping), Close: 9sec. (excluding mapping) |
| Door holding method | N/A | Vacuum absorption method |
| Detecting function | ①Open cassette normal placement ②Stage normal placement ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
①FOUP normal placement ②Foup door checking ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
| Standard feature | ①Wafer mapping ②Controller ③Carrier base placement adjustment mechanism ④Bolts surface position adjustment mechanism |
|
| ⑤Cassette side-slip prevention ⑥300mm FOUP Infopad pin holder ⑦Stage fixation at wafer horizontal position ⑧Minimizing vibration in rotating and power |
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| Utility | ①Power: DC24V 5A ②CDA: 0.45~0.6 MPa 20 L/min ③Vacuum: -40kPa 5L/min |
|
| Communication interface | RS232C or Ethernet*2 | |
| Options | ①Customizable indicator panel ②Customizable switch panel ③Applicable to AC200V ④Applicable to FOSB*1 ⑤E84 ⑥E84,CID communication (300mm FOUP only) |
|
*1. Depending on FOSB type, performance may vary. please contact us for details.
*2. Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.
Outline Drawing
