200mm SMIF Load Port
200mm
Contribute to high throughput at 200mm process line by automation
- OHT Transfer Applicable
Secure SEMI E15 C2 distance - E63 BOLTS-M Installation
Easy mounting design - RS-232C/Ethernet Applicable
High-performance/high-reliability control system PIO option compatible - 8-cell Indicator
Utilize indicator from 300mm LP - Mapping Functionality
Single/Double/Cross detection