Clean Transport Systems

200mm SMIF Load Port

200mm

Fully Compatible with 300mm BOLTS-M Installation

SELOP-08 Series

Contribute to high throughput at 200mm process line by automation

  1. OHT Transfer Applicable
    Secure SEMI E15 C2 distance
  2. E63 BOLTS-M Installation
    Easy mounting design
  3. RS-232C/Ethernet Applicable
    High-performance/high-reliability control system PIO option compatible
  4. 8-cell Indicator
    Utilize indicator from 300mm LP
  5. Mapping Functionality
    Single/Double/Cross detection

Ethernet is a registered trademark of Fuji Xerox Co., Ltd.

Operation Flow

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