Sorter
300mm
Supporting Highly Efficient and Stable Wafer Sorting
- Equipmented with High reliability and long selling SELOP series
Installation of N2 purge load ports (options) - Particle Free
Realized by original airflow and stationary robot - High Throughput
- Minimum Footprint
- SEMI Standard Software (support GEM300)
- Abundant Variations (2x2, 3x3, 4x4 port)
Options
- Wafer invert function
- Area sensor
- Lighting inside EFEM
- Vacuum-chucking finger type
- E84 interface
- Signal tower
- Ionizer
