Tape Frame FOUP Load Port
380mm Tape Frame
NEW
Yield improvement in post-process
Smart SELOP series
Meets Specifications Required for Semiconductor Manufacturing Equipment, such as Particle-Free and High Durability in Repeated Operation.
- High Reliability, Well Experience
Load Port for 300mm is working in the front-end process in all over the world - Particle Free
(1) Original Door opening technology prevents particle penetration
(2) Low vibration design - SEMI Standard Conformity
- CID Communication
*option - Adaptor for Open Cassette is Available
*option - Supporting N2 Purge Function
*option - Supporting Various Tape Frame FOUP
*upon inquiry
Applicable Carrier
- 380mm tape frame 13, 25 slots
Outline Drawing
SEMI standard conformity (E184)
Unit: mm
