Tape Frame Wafer EFEM
380mm Tape Frame
EFEM Solution for 3-D Stacking Device Process
(Semiconductor Manufacturing Process Using Tape Frame)
Tape Frame Wafer EFEM
- High Reliability, Well Experienced EFEM
for 300mm wafer is working in the front-end process in all over the world - SEMI Standard Conformity
- Supporting Various Type of Tape Frame FOUP
*Please contact for detail - Particle Free
Option
- Wafer invert function
- Area sensor
- E84 interface
- Ionizer
- N2 purge function for load port
