Semiconductor Manufacturing Equipment Specialized Applications Vacuum Transfer Robot
PickUp
Direct Drive Motor Specialized Applications
Direct Drive (DD) Motor
- High Precision in arm and swing motion due to DD motor
- DD motor is a concentration of our motion system technology over the years
- High accurate positioning and low vibration are realized by in-house Reducer and Timing Belt
Hollow DD motor with simple driving unit is realized
- DD motors are stacked
- Each driving axis is directly connected to DD motor
- Each driving axis is placed on the same axis
